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Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor
Publication:
Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor
Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Meunier-Beillard, Philippe
;
Dentel, D.
;
Goryll, M.
;
Vanhaeren, Danielle
;
Vescan, L.
;
Bender, Hugo
;
Caymax, Matty
;
Vandervorst, Wilfried
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1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations