Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor

Publication:

2001

Proceedings Paper

Author(s)

;

Meunier-Beillard, Philippe

;

Dentel, D.

;

Goryll, M.

;

;

Vescan, L.

;

;

;

1961 since deposited on 2021-10-14

Acq. date: 2026-01-25