Browsing by Author "Gosset, N."
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Publication Plasma cryoetching processes for silicon and advanced materials
;Dussart, R. ;Tillocher, T. ;Gosset, N. ;Vital, A ;Lefaucheux, P. ;L'jazouli, RBoufnichel, M.Meeting abstract2014, International Conference on Microelectronics and Plasma Technology - ICMAP, 8/07/2014