Publication:

Plasma cryoetching processes for silicon and advanced materials

Date

2014

Meeting abstract

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Files

29834.pdf 48.85 KB

Author(s)

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de Marneffe, Jean-Francois

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Baklanov, Mikhaïl

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Statistics

1910 since deposited on 2021-10-22

Acq. date: 2026-07-09