Publication:

Plasma cryoetching processes for silicon and advanced materials

Date

2014

Meeting abstract

Simple item page Full metadata Statistics

Files

29834.pdf 48.85 KB

Author(s)

;

;

;

;

;

;

;

;

;

;

de Marneffe, Jean-Francois

;

Baklanov, Mikhaïl

;

;

;

Statistics

1910 since deposited on 2021-10-22

1last month

Acq. date: 2026-05-20