Browsing by Author "Gostein, Michael"
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Publication Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
;Abell, Thomas ;Iacopi, Francesca ;Prokopowicz, Greg ;Sun, BradMazurenko, AlexProceedings paper2005-01, Advanced Metallization Conference 2004, 19/10/2004, p.457-462