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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
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1878 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Metrics
Views
1878 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations