Browsing by Author "Gottschalk, C."

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On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition

Onsia, Bart
;
Caymax, Matty
;
Conard, Thierry
;
De Gendt, Stefan
;
De Smedt, Frank
;
Delabie, Annelies
Proceedings paper
2005, Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium, 20/09/2004, p.19-22
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition

Onsia, Bart
;
Caymax, Matty
;
Conard, Thierry
;
De Gendt, Stefan
;
De Smedt, Frank
;
Delabie, Annelies
Oral presentation
2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS