Publication:

On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition

Date

2004

Presentation

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Author(s)

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Conard, Thierry

;

De Gendt, Stefan

;

De Smedt, Frank

;

Delabie, Annelies

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Vinckier, Chris

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Acq. date: 2026-01-26