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Browsing by Author "Gräupner, Paul"

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    Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells

    Bekaert, Joost  
    ;
    Laenens, Bart
    ;
    Verhaegen, Staf
    ;
    Van Look, Lieve  
    ;
    Trivkovic, Darko  
    Journal article
    2011-03, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 1, p.13008

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