Publication:

Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells

Date

2011
Journal article
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Author(s)

Bekaert, Joost  
;
Laenens, Bart
;
Verhaegen, Staf
;
Van Look, Lieve  
;
Trivkovic, Darko  
;
Lazzarino, Frederic  
;
Vandenberghe, Geert  
;
Van Adrichem, Paul  
;
Socha, Robert
;
Hsu, Stephen
;
Liu, Hua Yu
;
Mouraille, Orion
;
Schreel, Koen
;
Dusa, Mircea  
;
Zimmermann, Joerg
;
Gräupner, Paul
;
Neumann, Jens Timo

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

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1 since deposited on 2021-10-19
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1958 since deposited on 2021-10-19
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