Publication:
Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
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1 since deposited on 2021-10-19
Acq. date: 2025-10-23
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1956 since deposited on 2021-10-19
Acq. date: 2025-10-23
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1 since deposited on 2021-10-19
Acq. date: 2025-10-23
Views
1956 since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations