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Browsing by Author "Grégoire, C."

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    Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

    Rajagopal, A.
    ;
    Grégoire, C.
    ;
    Lemaire, J. J.
    ;
    Pireaux, J. J.
    ;
    Baklanov, Mikhaïl
    Journal article
    1999, Journal of Vacuum Science and Technology B, (17) 5, p.2336-2340

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