Browsing by Author "Grégoire, C."
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Publication Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
;Rajagopal, A. ;Grégoire, C. ;Lemaire, J. J. ;Pireaux, J. J.Baklanov, MikhaïlJournal article1999, Journal of Vacuum Science and Technology B, (17) 5, p.2336-2340