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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
Publication:
Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
Date
1999
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rajagopal, A.
;
Grégoire, C.
;
Lemaire, J. J.
;
Pireaux, J. J.
;
Baklanov, Mikhaïl
;
Vanhaelemeersch, Serge
;
Maex, Karen
;
Waeterloos, Joost
Journal
Journal of Vacuum Science and Technology B
Abstract
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1
since deposited on 2021-10-14
Acq. date: 2025-10-24
Views
1981
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations
Metrics
Downloads
1
since deposited on 2021-10-14
Acq. date: 2025-10-24
Views
1981
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations