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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

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1 since deposited on 2021-10-14
Acq. date: 2025-10-24

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1981 since deposited on 2021-10-14
Acq. date: 2025-10-24

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1 since deposited on 2021-10-14
Acq. date: 2025-10-24

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1981 since deposited on 2021-10-14
Acq. date: 2025-10-24

Citations