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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
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Acq. date: 2026-06-04
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Acq. date: 2026-06-04
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1 since deposited on 2021-10-14
Acq. date: 2026-06-04
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1986 since deposited on 2021-10-14
1last month
Acq. date: 2026-06-04
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