Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

dc.contributor.author	Rajagopal, A.
dc.contributor.author	Grégoire, C.
dc.contributor.author	Lemaire, J. J.
dc.contributor.author	Pireaux, J. J.
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Vanhaelemeersch, Serge
dc.contributor.author	Maex, Karen
dc.contributor.author	Waeterloos, Joost
dc.contributor.imecauthor	Vanhaelemeersch, Serge
dc.contributor.imecauthor	Maex, Karen
dc.contributor.orcidimec	Vanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned	2021-10-14T11:35:03Z
dc.date.available	2021-10-14T11:35:03Z
dc.date.embargo	9999-12-31
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3768
dc.source.beginpage	2336
dc.source.endpage	2340
dc.source.issue	5
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	17
dc.title	Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
dc.type	Journal article
dspace.entity.type	Publication
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