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Browsing by Author "Granger, P."

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    Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing

    Malhouitre, Stephane
    ;
    Van Hoeymissen, Jan
    ;
    Le, Quoc Toan  
    ;
    Kesters, Els  
    ;
    Granger, P.
    Proceedings paper
    2005, SEMATECH Surface Preparation and Cleaning Conference, 19/04/2005

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