Publication:
Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing
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1918 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Metrics
Views
1918 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations