Browsing by Author "Granger, Pascal"

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Etching of thermal SiO2 in supercritical CO2

Malhouitre, Stephane
;
Van Hoeymissen, Jan
;
Case, Carlye
;
Granger, Pascal
Proceedings paper
2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.71-78
Supercritical CO2 low-k dielectric repair

Malhouitre, Stephane
;
Van Hoeymissen, Jan
;
Muscat, Anthony
;
Granger, Pascal
;
Mertens, Paul
Proceedings paper
2005, Cleaning Technology in Semiconductor Devices Manufacturing IX, 16/10/2005, p.301-308