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Browsing by Author "Gravey, Virgine"

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    Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations

    Carbonell, Laure
    ;
    Caluwaerts, Rudy  
    ;
    Volders, Henny  
    ;
    Heylen, Nancy  
    ;
    Kellens, Kristof  
    Oral presentation
    2010, Advanced Metallization Conference - AMC

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