Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations

Simple item page Full metadata Statistics

Author(s)

Carbonell, Laure

;

Caluwaerts, Rudy

;

;

;

Kellens, Kristof

;

;

Van Ammel, Annemie

;

Van Roey, Frieda

;

Cockburn, Andrew

;

Gravey, Virgine

;

;

Rajagopalan, Ravi

;

;

Metrics

1958 since deposited on 2021-10-18

Acq. date: 2025-10-24