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Browsing by Author "Grella, L."

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    Fabrication of a micro-lens array for Reflective Electron Beam Lithography

    Vereecke, Bart  
    ;
    Haspeslagh, Luc  
    ;
    Lazzarino, Frederic  
    ;
    Miller, Andy  
    ;
    Kellens, Kristof  
    Proceedings paper
    2011, International Conference on Solid State Devices and Materials - SSDM, 28/09/2011

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