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Browsing by Author "Grobet, Piet"

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    Solid state MAS NMR spectroscopic characterization of plasma damage and UV modification of low-k dielectric films

    Abell, Thomas
    ;
    Houthoofd, Kristof
    ;
    Iacopi, Francesca
    ;
    Grobet, Piet
    ;
    Maex, Karen  
    Proceedings paper
    2005, Materials, technology, and Reliability of Advanced Interconnects, 28/03/2005, p.35-40

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