Publication:
Solid state MAS NMR spectroscopic characterization of plasma damage and UV modification of low-k dielectric films
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1855 since deposited on 2021-10-16
Acq. date: 2025-12-10
Citations
Metrics
Views
1855 since deposited on 2021-10-16
Acq. date: 2025-12-10
Citations