Browsing by Author "Gueneau de Mussy, Jean Paul"
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Publication Characterisation and behaviour of Ti/TiO2 noble metal anodes
Publication Novel selective sidewall airgap process
Proceedings paper2005, Proceedings of the IEEE International Interconnect Technology Conference - IITC, 6/06/2005, p.150-152Publication Selective sidewall airgap integration for deep submicrometer interconnects
Journal article2004, Electrochemical and Solid-State Letters, (7) 11, p.G286-G289Publication Self assembled airgap structures
Oral presentation2004, Workshop on Materials for Advanced Metallization - MAMPublication The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Proceedings paper2007, IEEE International Interconnect Technology Conference - IITC, 4/06/2007, p.164-166