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The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
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1926 since deposited on 2021-10-16
2last month
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Acq. date: 2026-09-18
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Statistics
Views
1926 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-09-18
Citations