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Browsing by Author "Guiot, Y."

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    Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions

    Abu Jeriban, Salima
    ;
    Guiot, Y.
    ;
    Bacherius, L.
    ;
    Proost, J.
    ;
    Sleeckx, Erik  
    ;
    Vos, Rita  
    ;
    Mertens, Paul  
    Proceedings paper
    2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.139-142

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