Browsing by Author "Guiot, Y."
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Publication Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions
;Abu Jeriban, Salima ;Guiot, Y. ;Bacherius, L. ;Proost, J.; ; Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.139-142