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Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions
Publication:
Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions
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Date
2008
Proceedings Paper
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15537.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Abu Jeriban, Salima
;
Guiot, Y.
;
Bacherius, L.
;
Proost, J.
;
Sleeckx, Erik
;
Vos, Rita
;
Mertens, Paul
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1882
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations
Metrics
Views
1882
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations