Browsing by Author "Gunn, Robert"

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Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Witvrouw, Ann
;
Rusu, C.
;
Janssen, Henri
;
Gunn, Robert
Journal article
2004, Microsystem Technologies, (10) 5, p.364-371
Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process

Rusu, Cristina
;
Jansen, Henri
;
Gunn, Robert
Proceedings paper
2003, Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP of MEMS & MOEMS, 5/05/2003, p.245-250