Browsing by Author "Guo, Daifeng"
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Publication Density-balancing mask sssignment for via patterning with directed self-assembly
;Tung, Maryann C. ;Guo, Daifeng ;Karageorgos, Ioannis ;Wong, Martin D. F.Wong, H.-S. PhilipMeeting abstract2016-10, 2nd International Symposium on DSA, 11/10/2016