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Density-balancing mask sssignment for via patterning with directed self-assembly
Publication:
Density-balancing mask sssignment for via patterning with directed self-assembly
Date
2016-10
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tung, Maryann C.
;
Guo, Daifeng
;
Karageorgos, Ioannis
;
Wong, Martin D. F.
;
Wong, H.-S. Philip
Journal
Abstract
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1829
since deposited on 2021-10-23
405
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Acq. date: 2025-10-25
Citations
Metrics
Views
1829
since deposited on 2021-10-23
405
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations