Publication:

Density-balancing mask sssignment for via patterning with directed self-assembly

Date

2016-10

Meeting abstract

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Author(s)

Tung, Maryann C.

;

;

Karageorgos, Ioannis

;

Wong, Martin D. F.

;

Wong, H.-S. Philip

Statistics

1834 since deposited on 2021-10-23

2last month

Acq. date: 2026-02-26