Publication:
Density-balancing mask sssignment for via patterning with directed self-assembly
Date
| dc.contributor.author | Tung, Maryann C. | |
| dc.contributor.author | Guo, Daifeng | |
| dc.contributor.author | Karageorgos, Ioannis | |
| dc.contributor.author | Wong, Martin D. F. | |
| dc.contributor.author | Wong, H.-S. Philip | |
| dc.date.accessioned | 2021-10-23T15:42:04Z | |
| dc.date.available | 2021-10-23T15:42:04Z | |
| dc.date.issued | 2016-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27410 | |
| dc.source.conference | 2nd International Symposium on DSA | |
| dc.source.conferencedate | 11/10/2016 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Density-balancing mask sssignment for via patterning with directed self-assembly | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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