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Browsing by Author "Gutshin, O.P."

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    Study of the reducing of defect density in STI etch process

    Danilkin, E.
    ;
    Kozulin, R.
    ;
    Polyakov, A.
    ;
    Trutaeva, M.
    ;
    Shamiryan, Denis
    ;
    Islyaykin, A.
    Oral presentation
    2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM

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