Browsing by Author "Gutshin, O.P."
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Study of the reducing of defect density in STI etch process
;Danilkin, E. ;Kozulin, R. ;Polyakov, A. ;Trutaeva, M. ;Shamiryan, DenisIslyaykin, A.Oral presentation2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM