Browsing by Author "Guyer, Eric"

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Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films

Iacopi, Francesca
;
Waldfried, Carlo
;
Abell, Thomas
;
Guyer, Eric
;
Eyckens, Brenda
Oral presentation
2005, MRS Spring Meeting Symposium B: Materials, Technology and Reliability of Advanced Interconnects
UV-assisted curing: an effective technique for toughening of low-k organosilicate films

Iacopi, Francesca
;
Waldfried, Carlo
;
Houthoofd, Kristof
;
Guyer, Eric
;
Gage, David
Oral presentation
2005, Advanced Metallization Conference