Publication:

UV-assisted curing: an effective technique for toughening of low-k organosilicate films

Date

2005

Presentation

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Author(s)

Iacopi, Francesca

;

Waldfried, Carlo

;

Houthoofd, Kristof

;

;

;

Carlotti, Giovanni

;

Travaly, Youssef

;

;

Escorcia, Orlando

;

;

;

Dauskardt, Reinhold

;

Statistics

1996 since deposited on 2021-10-16

Acq. date: 2026-05-19