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Browsing by Author "Héraud, Stéphane"

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    Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control

    Gunay Demirkol, Anil
    ;
    Altamirano Sanchez, Efrain  
    ;
    Héraud, Stéphane
    ;
    Godny, Stephane
    Proceedings paper
    2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.977807

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