Publication:

Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control

Date

2016
Proceedings Paper
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Author(s)

Gunay Demirkol, Anil
;
Altamirano Sanchez, Efrain  
;
Héraud, Stéphane
;
Godny, Stephane
;
Charley, Anne-Laure  
;
Leray, Philippe  
;
Urenski, Ronen
;
Cohen, Oded
;
Turovets, Igor
;
Wolfling, Shay

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