Browsing by Author "Hüging, N."

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Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

Mantl, S.
;
Holländer, B.
;
Hüging, N.
;
Luysberg, M.
;
Lenk, St.
;
Hogg, S.M.
;
Herzog, H.-J.
;
Hackbarth, T.
Oral presentation
2003, 12th EURO-CVD Workshop
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

Mantl, S.
;
Holländer, B.
;
Hüging, N.
;
Luysberg, M.
;
Lenk, S.
;
Hogg, S.M.
;
Herzog, H.J.
;
Hackbarth, T.
Meeting abstract
2003, Abstracts Book ICSI3: 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, 9/03/2003, p.117