Publication:
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
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1972 since deposited on 2021-10-15
Acq. date: 2026-02-25
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Statistics
Views
1972 since deposited on 2021-10-15
Acq. date: 2026-02-25
Citations