Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
Statistics
Statistics by Category
Download view's map
PNG
JPEG/JPG
Reports
Most viewed
Most viewed per month
Top city views
File Visits
Export Excel
Export CSV
Item
Views
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
1372