Browsing by Author "Habib, Mohamed"
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Publication EUV flare and proximity modeling and model-based correction
Proceedings paper2011, Extreme Ultraviolet (EUV) Lithography II, 27/02/2011, p.79690SPublication Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration
Journal article2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 4, p.41505