Browsing by Author "Hacker, Nigel"
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Publication Pore surface grafting of porous low-k dielectrics by selective polymers
Meeting abstract2016, Plasma Etch and Strip in Microtechnology - PESM, 5/09/2016Publication Pore surface grafting of porous low-k dielectrics by selective polymers
Journal article2017, Journal of Vacuum Science and Technology B, (25) 2, p.21211