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Pore surface grafting of porous low-k dielectrics by selective polymers
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Pore surface grafting of porous low-k dielectrics by selective polymers
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Date
2016
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rezvanov, Askar
;
Zhang, Liping
;
Watanabe, Mitsuhiro
;
Hacker, Nigel
;
Tokei, Zsolt
;
Boemmels, Juergen
;
Armini, Silvia
;
de Marneffe, Jean-Francois
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1884
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations
Metrics
Views
1884
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations