Browsing by Author "Haemers, J."
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Publication Texture of atomic layer deposited ruthenium
;Musschoot, J. ;Xie, Q. ;Deduytsche, D. ;De Keyser, K. ;Longrie, D. ;Haemers, J.Van den Berghe, S.Journal article2010, Microelectronic Engineering, (87) 10, p.1879-1883