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Browsing by Author "Haemers, J."

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    Publication

    Texture of atomic layer deposited ruthenium

    Musschoot, J.
    ;
    Xie, Q.
    ;
    Deduytsche, D.
    ;
    De Keyser, K.
    ;
    Longrie, D.
    ;
    Haemers, J.
    ;
    Van den Berghe, S.
    Journal article
    2010, Microelectronic Engineering, (87) 10, p.1879-1883

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