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Browsing by Author "Hai-Zhi, Song"

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    Plasma immersion ion implantation for shallow junctions in silicon

    Pinter, Istvan
    ;
    Abdulhadi, A. H.
    ;
    Makaro, Z.
    ;
    Khanh, N. Q.
    ;
    Adam, M.
    ;
    Barsony, I.
    ;
    Poortmans, Jef  
    Journal article
    1999, Applied Surface Science, 138-139, p.224-227

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