Publication:

Plasma immersion ion implantation for shallow junctions in silicon

Date

1999

Journal article

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Author(s)

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Abdulhadi, A. H.

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Sivoththaman, Sivanarayanamoorthy

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Adriaenssens, G.

Journal

Applied Surface Science

Metrics

1950 since deposited on 2021-10-14

Acq. date: 2025-12-11