Browsing by Author "Halder, S."
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Publication Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes
;Chowrira, B. ;Carballo, V. M. Blanco ;Dusa, M. ;Tan, L. E. ;Vats, H. ;Gillijns, W.Decoster, S.Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, FEB 24-27, 2025