Browsing by Author "Hall, L. H."
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Metal interactions with silica (SiO2) surfaces: adsorption and ion exchange
Proceedings paper1996, Proceedings of the Fourth International Symposium on Cleaning technology in Semiconductor Device Manufacturing, 9/10/1995, p.277-283Publication Metal removal without particle addition: optimization of the dilute HCl clean
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.41-45Publication The role of hydrogen peroxide in the SC2 clean
Proceedings paper1994, Proceedings of the Institute of Environmental Science: 40th Annual Technical Meeting Proceedings, 01/05/1994, p.218-222