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Conference contributions
The role of hydrogen peroxide in the SC2 clean
Publication:
The role of hydrogen peroxide in the SC2 clean
Date
1994
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hurd, Trace
;
Mertens, Paul
;
Schmidt, Harald
;
Ditter, D.
;
Hall, L. H.
;
Meuris, Marc
;
Heyns, Marc
Journal
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2083
since deposited on 2021-09-29
494
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
2083
since deposited on 2021-09-29
494
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations