Publication:

The role of hydrogen peroxide in the SC2 clean

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHurd, Trace
dc.contributor.authorMertens, Paul
dc.contributor.authorSchmidt, Harald
dc.contributor.authorDitter, D.
dc.contributor.authorHall, L. H.
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T12:42:19Z
dc.date.available2021-09-29T12:42:19Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/201
dc.source.beginpage218
dc.source.conferenceProceedings of the Institute of Environmental Science: 40th Annual Technical Meeting Proceedings
dc.source.conferencedate01/05/1994
dc.source.conferencelocationChicago, IL USA
dc.source.endpage222
dc.title

The role of hydrogen peroxide in the SC2 clean

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
193.pdf
Size:
423.02 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions