Browsing by Author "Han, Keping"
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Publication Highly scalable bulk FinFET devices with multi-VT options by conductive metal gate stack tuning for the 10-nm node and beyond
Proceedings paper2014, VLSI Technology Symposium, 9/06/2014, p.56-57Publication Post extension ion implant photo resist strip for 32 nm technology and beyond
Oral presentation2008, 9th International Symposium on Utra Clean Processing of Semiconductor Surfaces - UCPSS