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Browsing by Author "Han, Q."

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    Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions

    Kesters, Els  
    ;
    Le, Quoc Toan  
    ;
    Boullart, Werner  
    ;
    Han, Q.
    ;
    Berry, I.
    ;
    Waldfried, C.
    ;
    Mertens, Paul  
    Proceedings paper
    2005, Cleaning Technology in Semiconductor Devices Manufacturing IX, 16/10/2005, p.319-326

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