Browsing by Author "Han, Q."
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions
Proceedings paper2005, Cleaning Technology in Semiconductor Devices Manufacturing IX, 16/10/2005, p.319-326