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Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions
Publication:
Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kesters, Els
;
Le, Quoc Toan
;
Boullart, Werner
;
Han, Q.
;
Berry, I.
;
Waldfried, C.
;
Mertens, Paul
;
Heyns, Marc
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1838
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1838
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations