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Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions

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1841 since deposited on 2021-10-16
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Acq. date: 2026-02-24

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1841 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-02-24

Citations