Browsing by Author "Han, Sang-Hyun"
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Publication Study of sub-melt laser damage annealing using Therma-Probe
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009Publication Study of sub-melt laser induced junction non-uniformities using Therma-Probe
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009, p.218-224Publication Study of submelt laser induced junction nonuniformities using Therma-Probe
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C21-C1C26